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The Cranfield Precision SiWeg Silicon Wafer Edge Grinding machine the World''s first ductile regime grinding machine for edge and notch profiling of 200mm, 300mm

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International Journal of Machine Tools Manufacture 47 (2007) 1–13 Grinding wheels for manufacturing of silicon wafers: A literature review

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The Cranfield Precision SiWeg Silicon Wafer Edge Grinding machine the World''s first ductile regime grinding machine for edge and notch profiling of 200mm, ...

International Journal of Machine Tools Manufacture 41 (2001) 659–672 Fine grinding of silicon wafers Pei a,*, Alan Strasbaugh b a Department of Industrial ...

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The majority of semiconductor devices are built on silicon wafers. Manufacturing of highquality silicon wafers involves several machining processes including grinding.

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